Dual rotating compensator ellipsometer RC2

From Woollam Co.

The RC2 is the first spectroscopic ellipsometer with two rotating compensators. It combines the best features of previous instruments with innovative new technology: dual rotating compensator, achromatic compensator design, advanced light source and next-generation spectrometer design. The RC2 is a near-universal solution for the diverse applications of spectroscopic ellipsometry and Mueller matrix ellipsometry.

Ex-situ, in-situ or inline
Dual rotating compensator ellipsometer
Modular design with variety of options and configurations
Maximum spectral range 193 to 2500 nm
Fully automated

The RC2 design builds up on 25 years of experience. It combines the best features of previous models with new innovative technology: dual rotating compensators, achromatic compensator design advanced light source and next-generation of spectrometer design. The RC2 is a near-universal solution for diverse application of spectroscopic ellipsometry. Based on the modularity, the RC2 can be attached directly to your process chambers or configured on any of our table-top bases. Advanced design ensures accurate ellipsometry measurements for any sample and includes measurement features like Generalized Ellipsometry, Mueller matrix and depolarisation.

Fast measurement speed

The synchronous operation of both compensators provides highly accurate data without waiting to “zone-average” over optical elements. Simultaneously collects the entire spectrum (over 1000 wavelengths) in a fraction of a second.

Advanced light source

The next-generation light source includes computer-controlled beam intensity to automatically optimize the signal on any sample (low or high reflection).

Wavelength range

  • RC2-U: 245 bis 1000 nm
  • RC2-D: 193 to 1000 nm
  • NIR extension: to 1690 nm

Data acquisition rate

Measures the complete spectrum in 1/3 of a second – even advanced data types like the Mueller matrix.

Available Ex-situ Stages

  • Fixed angle: 65°
  • Horizontal auto angle: 45° - 90°
  • Vertical auto angle: 20° - 90°


Nearly all options available for the M-2000 are also available for the RC2:

  • Automated XY Mapping Stage (from 100 mm to 450 mm)
  • Sample rotator
  • Focusing option
  • Liquid cells
  • Heat stages
  • Etc.
Optical constants and thickness, anisotropy, index gradient, composition

The RC2 is an extremely accurate system to determine optical constants, thickness, optical anisotropy, index gradient, composition, etc.

Homogeneitythickness profile

In combination with an automated XY mapping stage, sample homogeneity, thickness profile etc. can be determined with automated measurement recipes.

Dynamic measurementsadsorption kinetics

Dynamic measurements can be performed either with the in-situ package attached to an UHV deposition chamber or with liquid and heat cells attached to an ex-situ RC2. Thus, the time-dependent adsorption of molecules out of a liquid ambient can be traced and measured in real-time. Alternatively, temperature-dependent changes of the sample can be determined, like phase-transitions or the glass transition temperature of polymers.

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